Sputtering Process - SlideServe

SOLVED: For the metallization process of the Al electrode in FET, magnetron sputtering was employed. During the sputtering process, plasma was developed between the target and substrate. Estimate the thermal energy of the Al particles that were sputtered and transferred to the substrates. Consider the following conditions: - The distance between the target and substrate is around 20 cm.- The momentum energy can be transferred by the kinematic factor, and all velocities of particles in the vacuum

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