For decades, optical inspection has been the primary method for process control in fabs. However, the move to multi-level interconnects and 3D transistor designs means that many killer defects are no ...
Defect detection requirements on the order of 10 defective parts per million (DPPM) are driving improvements in inspection tools’ resolution and throughput at foundries and OSATs. However, defects ...
一部の結果でアクセス不可の可能性があるため、非表示になっています。
アクセス不可の結果を表示する