AUSTIN, Texas — In a move intended to spur the use of chromeless phase shift mask technology, ASML MaskTools and Photronics, Inc. announced Wednesday (Dec. 17) an agreement that combines ASML's ...
United Microelectronics Corp. has moved into the use chromeless (Cr-less) phase-shift mask technology at the 90nm node, the foundry announced today. “UMC's 90nm silicon success, using Cr-less PSMs and ...
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