The state of the target varies with the parameters for the three sputtering modes, and the SMD consists of various voltage-current (V-I) curves at different nitrogen contents and sputtering currents.
The MEGA coating system (multi-source magnetron sputtering system) enables the production of new types of metallic or ceramic coatings in monolithic, graded or multi-layer arrangements using 7 ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback