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Quadrupole mass-spectroscopy has reported significant neutral and ionic species in the unique C 5 HF 7 /O 2 /Ar plasma, including C x F y (X>2), C x HF y, and C x F y (Y/X<2). Using C 5 HF 7 /O 2 /Ar ...
Abstract: We have investigated the impact of polarity and Hf concentration on HfSiON/SiO 2 gate dielectrics breakdown with TZDB and TDDB. In TZDB, gate leakage currents at breakdown in negative bias ...