Abstract: Rib and buried channel waveguides (BCWs) made of unannealed PECVD SiO 2 were studied after exposure to high humidity. Low stressed rib waveguides had lower optical throughput change, while ...
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Various thin-film deposition tools, including PVD (e-beam & thermal evaporators, DC & RF magnetron (reactive) sputterers) and CVD (APCVD of graphene, Si oxidation, PECVD of SiO2 and SiNx). Available ...
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