The term scatterometry is a general term for a variety of methods that are used to analyze the diffraction spectrum from illuminated samples. The unknown structure parameters are reconstructed by the ...

Abstract: Two various versions of the Modified Volume Integral Equation Method (MVIEM) for solving the diffraction problem on a permeable, inhomogeneous body located in free space are presented. The ...

Abstract: To overcome the challenge of balancing high performance with low manufacturing cost in large-aperture compact antenna test range (CATR) systems, this letter proposes and validates a novel ...