CVD装置の構造とは？｜分子をふるい落とす「ガスのシャワー」 CVD（Chemical Vapor Deposition）装置は、イメージするなら「分子の粉をふるう装置」です。 シャワーヘッドのような散布口から、成膜に必要なガスをウエハに向かって均一に降り注がせます。

Polymerization by chemical vapor deposition (CVD) is a simple method for modifying surfaces by which topologically challenging substrates can be evenly coated with polymers. In the journal Angewandte ...

Engineers establish the link between oxygen and graphene quality and present an oxygen-free chemical vapor deposition method (OF-CVD) that can reproducibly create high-quality samples for large-scale ...

We are developing the following technologies and methods in order to maintain Environmental Barrier Coatings (EBC) structure and Interfacial Control Coating structure, and Mechanical Properties ...

Medical implants often carry surface substrates that release ac-tive substances or to which biomolecules or cells can adhere better. However, degradable gas-phase coatings for degradable implants, ...

A new technical paper titled “On the quality of commercial chemical vapour deposited hexagonal boron nitride” was published by researchers at KAUST and the National Institute for Materials Science in ...

TMDs, or Transition Metal Dichalcogenides, are a novel class of two-dimensional materials with characteristics ranging from metals (e.g., NbTe 2, TaS 2) to superconductors (e.g., NbSe 2, NbS 2, PdTe 2 ...