United Microelectronics Corp. has moved into the use chromeless (Cr-less) phase-shift mask technology at the 90nm node, the foundry announced today. “UMC's 90nm silicon success, using Cr-less PSMs and ...
AUSTIN, Texas &#151 In a move intended to spur the use of chromeless phase shift mask technology, ASML MaskTools and Photronics, Inc. announced Wednesday (Dec. 17) an agreement that combines ASML's ...