SAN JOSE, Calif. &#151 Actinix Inc. has been awarded a Phase II grant from the National Science Foundation (NSF) to complete the development of its phase-shift metrology system for advanced photomasks ...
AUSTIN, Texas &#151 In a move intended to spur the use of chromeless phase shift mask technology, ASML MaskTools and Photronics, Inc. announced Wednesday (Dec. 17) an agreement that combines ASML's ...