We demonstrate that silicon nanowire (SiNW) Li-ion battery anodes that are conformally coated with TiO2 using atomic layer deposition (ALD) show a remarkable performance improvement. The coulombic ...

Ultrathin TiO2 was grown on hematite surface by atomic layer deposition (ALD). Obvious photoelectrochemical water oxidation performance improvement was observed for samples treated with as few as a ...

ALD（Atomic Layer Deposition）装置は、まるで「分子のミルフィーユ」を作るような繊細な成膜技術です。 CVD（化学気相成長法）が“シャワーのように原料ガスを振りかけて一気に反応させる”のに対し、ALDは“1層ずつ丁寧に原子の膜を重ねる”手法。ガスを順番 ...

Abstract: Titanium dioxide, known as a high-k biocompatible dielectric transducer material, is processed by means of ALD and applied to a 3D structure with dimensions typical for multi-site ...

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Department of Materials Science and Engineering, Feng Chia University, No. 100 Wenhwa Road, Seatwen, Taichung 40724, Taiwan *Tel: 886-4 245-17250. Fax: 886-4 245-10014. E-mail: [email protected].

SkyWater Technology has announced it will offer customers a new semiconductor processing tool for atomic layer deposition (ALD), the Applied Picosun Morpher. Many devices, such as sensors and emerging ...