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Department of Materials Science and Engineering, Feng Chia University, No. 100 Wenhwa Road, Seatwen, Taichung 40724, Taiwan *Tel: 886-4 245-17250. Fax: 886-4 245-10014. E-mail: [email protected].
Abstract: Titanium dioxide, known as a high-k biocompatible dielectric transducer material, is processed by means of ALD and applied to a 3D structure with dimensions typical for multi-site ...
SkyWater Technology has announced it will offer customers a new semiconductor processing tool for atomic layer deposition (ALD), the Applied Picosun Morpher. Many devices, such as sensors and emerging ...
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