Abstract: Insulator engineering is required to improve the reliability of amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs). Silicon dioxide (SiO2), which is widely used as the ...
Article subjects are automatically applied from the ACS Subject Taxonomy and describe the scientific concepts and themes of the article. One of the main emerging solutions is to implement self-aligned ...
Abstract: To date, Plasma Enhanced Chemical Vapor Deposition (PECVD) O3/TEOS has been the prevalent dielectric liner for TSV applications. This process typically results in poor step coverage for high ...
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SkyWater Technology has announced it will offer customers a new semiconductor processing tool for atomic layer deposition (ALD), the Applied Picosun Morpher. Many devices, such as sensors and emerging ...
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